Electrical characterization, sensitivity and gas sensing response of zinc oxide thin film at different film thickness & substrate temperature

Abstract

From two-three decades, zinc oxide (ZnO) metal oxide semiconductor has paid too much interest as a gas sensitive material by researchers, because of better performance of ZnO thin film. After deposition and gas sensing characteristics of ZnO thin films, the films are studied with different aspects and responses. In this research paper, temperature and film thickness based electrical characteristics, sensitivity and gas sensing response are mentioned.