Effect of Dual Frequency on Discharge Characteristics in Capacitive RF Argon Discharge

Abstract

We investigate dual frequency in argon discharge capacitively, and study the plasma parameters influenced by dual frequency. The results indicated that the electron heating may be slightly reduced with the Ohmic heating at low frequencies. Meanwhile, the ionization rates, electron heating distributions are enhanced by dual frequency source. Different style of the dual frequency shows distributions of field asymmetrical. The ohmic heating being dominant in high pressure. Both low and high frequencies have effect on electron heating, ionization rate and plasma convective. So, effect of dual frequency in glow discharges processes is worth investigating.